3-axis Stage Options

Standard 3-axis Stage
Models 190, 200, 250, 290, 400



 

Advanced 3-axis Stage
Models 260, 500, 590, 790


 
 
Feature
 		 Standard 3-axis Stage
 		 Advanced 3-axis Stage
 
Supports weight up to 2 lbs (0.9 kg) up to 20 lbs (9.1 kg)
Removable Leveling Stage with Post No Yes
Fine Vertical Adjustment Yes Yes
Course Vertical Adjustment No Yes
Supports Environmental Chamber p/n 100-07 No Yes
Supports Environmental Fixture p/n 100-14 Yes Yes
Supports Rotating Wafer Support p/n 100-21 Yes* Yes*
Supports Advanced Chamber p/n 100-26 No Yes^
Support Peltier Environmental Chamber p/n 100-30 Yes Yes
Supports Heated Environmental Cell p/n 100-33 Yes Yes
Supports Hot Plate p/n 100-33-HP Yes Yes

* Rotating wafer support limited in diameter on some models.
^ Advanced Chamber requires Model 500 or higher.

 

For more information or a quotation, please contact us
or call 973-448-0305
To purchase spare parts, please visit www.ramehart.us.
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